JPH02117655U - - Google Patents
Info
- Publication number
- JPH02117655U JPH02117655U JP2646689U JP2646689U JPH02117655U JP H02117655 U JPH02117655 U JP H02117655U JP 2646689 U JP2646689 U JP 2646689U JP 2646689 U JP2646689 U JP 2646689U JP H02117655 U JPH02117655 U JP H02117655U
- Authority
- JP
- Japan
- Prior art keywords
- wafer holder
- ion implanter
- wafer
- vacuum chamber
- heat pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2646689U JPH02117655U (en]) | 1989-03-07 | 1989-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2646689U JPH02117655U (en]) | 1989-03-07 | 1989-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02117655U true JPH02117655U (en]) | 1990-09-20 |
Family
ID=31248118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2646689U Pending JPH02117655U (en]) | 1989-03-07 | 1989-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02117655U (en]) |
-
1989
- 1989-03-07 JP JP2646689U patent/JPH02117655U/ja active Pending